Properties of dielectric BaTiO{sub 3} thin films prepared by spray pyrolysis

Journal Article · Wed Jul 01 04:00:00 EDT 1998 · Chemistry of Materials

DOI:https://doi.org/10.1021/cm980153+· OSTI ID:638333

Golego, N; Studenikin, S A; Cocivera, M ^[1]

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1. Univ. of Guelph, Ontario (Canada). Guelph-Waterloo Centre for Graduate Work in Chemistry

Thin-film BaTiO{sub 3} has been prepared for the first time by spray pyrolysis. Both smooth and highly porous films were deposited depending on deposition temperature and rate. As-deposited films contained an unidentified, low-symmetry barium titanate modification. Annealing at 500--900 C converted the films to the cubic phase, while annealing at 1000 C produced the tetragonal phase and an increase in the grain size. As-deposited and annealed films were highly dielectric with DC resistivity in the 10{sup 10}--10{sup 12} {Omega}{center_dot}cm range. AC resistivity decreased with frequency following a power-law dependence with an exponent of {minus}0.6 to {minus}0.7. Both resistivity and capacitance remained stable at temperatures to 400 C. The effective dielectric constant (20--25 at 10 kHz) was possibly determined by amorphous grain-boundary region with high density of traps.

• OSTI ID: 638333
• Journal Information: Chemistry of Materials, Journal Name: Chemistry of Materials Journal Issue: 7 Vol. 10; ISSN CMATEX; ISSN 0897-4756
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM OXIDES
CAPACITANCE
CRYSTAL LATTICES
DIELECTRIC PROPERTIES
ELECTRIC CONDUCTIVITY
GRAIN SIZE
MICROSTRUCTURE
SPRAYED COATINGS
THIN FILMS
TITANIUM OXIDES