Dielectric response of Cu/amorphous BaTiO{sub 3}/Cu capacitors

Journal Article · Sun Apr 01 04:00:00 EDT 2007 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.2716871· OSTI ID:20982801

Gonon, P; El Kamel, F ^[1]

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1. Microelectronics Technology Laboratory, French National Research Centre and Joseph Fourier University, CEA/Leti/D2NT/LTM, 17 Avenue des Martyrs, 38054 Grenoble Cedex 9 (France)

Cu/amorphous BaTiO{sub 3}/Cu capacitors were tested for their dielectric properties in the 0.1 Hz-100 kHz range, from room temperature to 350 degree sign C. The amorphous barium titanate dielectric layer was deposited by rf sputtering on water-cooled copper electrodes. The room-temperature dielectric constant is around 18 and the dissipation factor is 3x10{sup -3} at 100 kHz. When increasing temperature the dielectric response displays an important frequency dispersion with the appearance of a marked loss peak at low frequencies. This dispersion is ascribed to electrode polarization effects, as evidenced by measurements performed on various film thicknesses and by using different electrodes. The electrode polarization phenomenon is discussed using a simple space charge model and is shown to be related to mobile oxygen vacancies.

• OSTI ID: 20982801
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 7 Vol. 101; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
AMORPHOUS STATE
BARIUM COMPOUNDS
CAPACITORS
COPPER
DEPOSITION
DIELECTRIC MATERIALS
DISPERSIONS
DISSIPATION FACTOR
ELECTRODES
OXYGEN
PERMITTIVITY
SPACE CHARGE
SPUTTERING
TEMPERATURE DEPENDENCE
TEMPERATURE RANGE 0273-0400 K
TEMPERATURE RANGE 0400-1000 K
THIN FILMS
TITANATES
VACANCIES
WATER