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Stabilization of tetragonal ZrO/sub 2/ with Al/sub 2/O/sub 3/ in reactive magnetron sputtered thin films

Journal Article · · J. Vac. Sci. Technol., A; (United States)
DOI:https://doi.org/10.1116/1.574925· OSTI ID:6370671
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Thin-film mixtures of zirconia and alumina 1--2 ..mu..m in thickness were produced by sputtering composite targets of zirconium and aluminum metals and reacting the metal vapor with oxygen. X-ray and selected area electron diffraction indicated that the films deposited at room temperature were amorphous. Rutherford backscattering measurements indicated that the films were stoichiometric. Annealing at 1000/sup 0/C for 48 h produced ordering of the zirconia phase, and the zirconia crystal structure was strongly dependent upon the relative amounts of zirconium and aluminum. Pure zirconia was monoclinic as was a mixture with a zirconium-to-aluminum atom ratio of 0.76:0.24. For the mixture with a zirconium-to-aluminum atom ratio of 0.52:0.48 the tetragonal phase of zirconia was observed with only a trace of the monoclinic phase. The alumina phase apparently orders much more slowly than zirconia, and no alumina diffraction peaks were observed in any of these mixtures with zirconium-to-aluminum atom ratios down to 0.52:0.48.

Research Organization:
School of Engineering and Applied Sciences, George Washington University, Washington, DC 20052
OSTI ID:
6370671
Journal Information:
J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 5:4; ISSN JVTAD
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ALUMINIUM
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ANNEALING
BINARY MIXTURES
CHALCOGENIDES
COHERENT SCATTERING
CRYSTAL LATTICES
CRYSTAL STRUCTURE
CRYSTAL-PHASE TRANSFORMATIONS
DEPOSITION
DIAGRAMS
DIFFRACTION
DISPERSIONS
ELECTRON DIFFRACTION
ELEMENTS
FILMS
HEAT TREATMENTS
METALS
MIXTURES
NONMETALS
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHASE DIAGRAMS
PHASE STUDIES
PHASE TRANSFORMATIONS
SCATTERING
SPUTTERING
STABILIZATION
TETRAGONAL LATTICES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
VERY HIGH TEMPERATURE
X-RAY DIFFRACTION
ZIRCONIUM
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES