A High Resolution Sub-Micron Retarding Field Energy Analyzer for Low Temperature Plasma Analysis

Technical Report · Tue Jun 15 00:00:00 EDT 1999

OSTI ID:6370329

Blain, M G; Stevens, J E; Woodworth, J R

A retarding potential energy analyzer having 750 nm diameter, self-aligned grid apertures and micron scale grid separation has been fabricated using polycrystalline silicon and silicon dioxide. High resolution in situ measurements of ion velocity distributions have been demonstrated in inductively coupled argon plasmas. Measurement results agree well with those from a macroscopic analyzer. Important differences are observed in the energies of plasma ions when measured with respect to chamber wall versus those measured with respect to the plasma floating potential. Preliminary measurements under rf bias conditions have also been made and results follow the expected trends.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 6370329
• Report Number(s): SAND99-1509J; ON: DE00007865
• Resource Relation: Other Information: Preprint; Related Information: Applied Physics Letters
• Country of Publication: United States
• Language: English

Related Subjects

47 OTHER INSTRUMENTATION
ELECTRIC POTENTIAL
ELECTROSTATIC ANALYZERS
PLASMA
SILICON
SILICON OXIDES
BEAM ANALYZERS
CHALCOGENIDES
ELEMENTS
OXIDES
OXYGEN COMPOUNDS
SEMIMETALS
SILICON COMPOUNDS
440000* - Instrumentation