IR, optical, and electron-spin-resonance study of as-deposited and annealed a-Ge/sub 1-//sub x/C/sub x/:H prepared by rf sputtering in Ar/H/sub 2//C/sub 3/H/sub 8/

Journal Article · Sat Aug 01 04:00:00 EDT 1987 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.339710· OSTI ID:6369624

Shinar, J; Wu, H S; Shinar, R; Shanks, H R

Hydrogenated amorphous germanium carbide (a-Ge/sub 1-//sub x/C/sub x/:H ) films were prepared by rf sputtering, at various rf power levels and mixtures of Ar, H/sub 2/, and propane. As in the case of a-Si:H rf sputtered under similar conditions, the concentration of Ge--H bond, as determined by the IR absorption spectra, and the Tauc determined optical gap, generally increase as the rf power is decreased. The optical gap of the a-Ge/sub 1-//sub x/C/sub x/:H films range from 0.85--2.3 eV, and the electron-spin-resonance defect spin densities from 6.5 x 10/sup 17/ to 3 x 10/sup 18/ spins/cm/sup 3/. Auger spectroscopy was used to determine the C/Ge ratio and indicated that in most of the samples, this ratio was approx. <0.15. Isochronal annealing up to 400 /sup 0/C indicated that (i) Ge-C segregation effects already initiated at 100 /sup 0/C are greatly enhanced above 300 /sup 0/C, (ii) at 300 /sup 0/C C--H bonds are formed at the expense of Ge--H ones, and (iii) all of the hydrogen bonded to Ge and most of that bonded to carbon evolve out of the sample at or slightly below 400 /sup 0/C.

• Research Organization: Ames Laboratory: U.S. Department of Energy and Department of Physics, Iowa State University, Ames, Iowa 50011
• DOE Contract Number: W-7405-ENG-82
• OSTI ID: 6369624
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 62:3; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360603* -- Materials-- Properties
ABSORPTION SPECTRA
ANNEALING
CARBIDES
CARBON COMPOUNDS
CHEMICAL BONDS
CHEMICAL COMPOSITION
CHEMICAL REACTIONS
ELECTRON SPIN RESONANCE
GERMANIUM CARBIDES
GERMANIUM COMPOUNDS
HEAT TREATMENTS
HYDROGENATION
IMPURITIES
INFRARED SPECTRA
MAGNETIC RESONANCE
OPTICAL PROPERTIES
PHYSICAL PROPERTIES
RESONANCE
SPECTRA
SPUTTERING