Continuous cryopump with a method for removal of solidified gases

Patent · Thu May 05 00:00:00 EDT 1988

OSTI ID:6362675

Carlson, L. W.; Herman, H.

An improved cryopump for the removal of gases from a high vacuum, comprising a cryopanel incorporating honeycomb structure, refrigerant means thermally connected to the cryopanel, and a rotatable channel moving azimuthally around an axis located near the center of the cryopanel, removing gases adsorbed within the honeycomb structure by subliming them and conducting them outside the vacuum vessel. 4 figs.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL (United States)
• DOE Contract Number: W-31109-ENG-38
• Assignee: US Dept. of Energy
• Patent Number(s): PATENTS-US-A7190567
• Application Number: ON: DE89009760
• OSTI ID: 6362675
• Resource Relation: Other Information: Portions of this document are illegible in microfiche products
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CRYOPUMPS
DESIGN
FLOW RATE
GAS FLOW
HIGH VACUUM
INVENTIONS
VALVES
CONTROL EQUIPMENT
EQUIPMENT
FLOW REGULATORS
FLUID FLOW
LABORATORY EQUIPMENT
PUMPS
VACUUM PUMPS
420201* - Engineering- Cryogenic Equipment & Devices