Continuous cryopump with a method for removal of solidified gases

Patent · 31 December 1988

OSTI ID:866992

Carlson, Larry W ^[1]; Herman, Harold ^[2]

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1. Oswego, IL
2. Park Forest, IL

An improved cryopump for the removal of gases from a high vacuum, comprising a cryopanel incorporating honeycomb structure, refrigerant means thermally connected to the cryopanel, and a rotatable channel moving azimuthally around an axis located near the center of the cryopanel, removing gases absorbed within the honeycomb structure by subliming them and conducting them outside the vacuum vessel.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL
• DOE Contract Number: W-31109-ENG-38
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4838035
• OSTI ID: 866992
• Country of Publication: United States
• Language: English

Related Subjects

/62/417/428/
absorbed
axis
azimuthally
center
channel
comb structure
comprising
conducting
connected
continuous
continuous cryopump
cryopanel
cryopump
gases
honeycomb
honeycomb structure
improved
incorporating
located
located near
means
method
moving
near
outside
refrigerant
removal
removing
removing gas
removing gases
rotatable
solidified
structure
subliming
thermally
thermally connected
vacuum
vacuum vessel
vessel