Moisture analysis of small hermetically sealed devices

Technical Report · Mon Jun 08 00:00:00 EDT 1987

OSTI ID:6362256

Mauldin, C B

Moisture, even in small quantities, can have serious detrimental effects on small electronic devices. Therefore, there is a growing interest in developing methods to analyze moisture in package ambients of hermetically sealed devices. The General Electric Neutron Devices Department (GEND) has developed methods to measure moisture and other ambient gases in small hermetically sealed devices. Volumes as small as 0.01 cm/sup 3/ at atmospheric pressure have been analyzed down to a level of 300 parts per million. Results of this analysis are given in this report. Samples as large as 10 cm/sup 3/ at atmospheric pressure have also been successfully analyzed.

• Research Organization: General Electric Co., Largo, FL (USA). Neutron Devices Dept.
• DOE Contract Number: AC04-76DP00656
• OSTI ID: 6362256
• Report Number(s): GEPP-TIS-1015; ON: DE87010693
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420800* -- Engineering-- Electronic Circuits & Devices-- (-1989)
440300 -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
CALIBRATION
ELECTRONIC CIRCUITS
FLUIDS
GASES
INTEGRATED CIRCUITS
MASS SPECTROMETERS
MEASURING INSTRUMENTS
MEASURING METHODS
MICROELECTRONIC CIRCUITS
MOISTURE
MOISTURE GAGES
PACKAGING
SPECTROMETERS