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U.S. Department of Energy
Office of Scientific and Technical Information

Ceramic coatings via PVD

Conference · · Ceram. Eng. Sci. Proc.; (United States)
OSTI ID:6360868

Physical vapor deposition (PVD) of ceramics has only recently reached commercial maturity. There are two main process categories: sputter-source PVD and evaporative-source PVD. Both methods have received their greatest development for the deposition of TiN. Both processes offer, in principle, the possibility to deposit a variety of alternative ceramic coatings. However, only the sputter source processes currently offer this commercial capability. Most PVD systems produce strongly oriented coatings, containing varying degrees of residual elastic stress, depending upon the coating/substrate composite body concerned. 59 references.

OSTI ID:
6360868
Report Number(s):
CONF-880118-
Journal Information:
Ceram. Eng. Sci. Proc.; (United States), Journal Name: Ceram. Eng. Sci. Proc.; (United States) Vol. 9; ISSN CESPD
Country of Publication:
United States
Language:
English