Laser vapor phase synthesis of submicron silicon and silicon nitride powders from halogenated silanes

Conference · Mon Aug 01 04:00:00 EDT 1988 · Ceram. Eng. Sci. Proc.; (United States)

OSTI ID:6360829

Bauer, R A; Smulders, R; Geus, E R; Van Der Put, P J; Becht, J G.M.

Laser-vapor-phase synthesis of Si/sub 3/N/sub 4/ spherical amorphous powders, with particle sizes of submicron dimensions, from SiH/sub 2/Cl/sub 2/-NH/sub 3/ and SiCl/sub 4/-NH/sub 3/ mixtures, was achieved using a 150-W CW CO/sub 2/ and a specially developed laser reactor. A concentric N/sub 2/ gas stream was used to guide the ceramic powders into a high-temperature electrostatic precipitator in which Si/sub 3/N/sub 4/ was separated from the waste product NH/sub 4/Cl. The powders were characterized using IR spectroscopy, X-ray fluorescence, EDX, XRD, and electron diffraction, and particle sizes were estimated using TEM and BET analyses. 15 references.

• OSTI ID: 6360829
• Report Number(s): CONF-880118-
• Conference Information: Journal Name: Ceram. Eng. Sci. Proc.; (United States) Journal Volume: 9
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
AMMONIA
AMORPHOUS STATE
CARBIDES
CARBON COMPOUNDS
CARBON DIOXIDE LASERS
ELEMENTS
GAS LASERS
HYDRIDES
HYDROGEN COMPOUNDS
LASERS
NITRIDES
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
PARTICLE SIZE
PNICTIDES
POWDERS
SEMIMETALS
SILANES
SILICON
SILICON CARBIDES
SILICON COMPOUNDS
SILICON NITRIDES
SIZE
SYNTHESIS