Synthesis of silicon carbide-silicon nitride composite ultrafine particles using a carbon dioxide laser

Journal Article · Sat May 01 04:00:00 EDT 1993 · Journal of the American Ceramic Society; (United States)

DOI:https://doi.org/10.1111/j.1151-2916.1993.tb03740.x· OSTI ID:6460782

Suzuki, Masaaki; Maniette, Yves; Nakata, Yoshinori; Okutani, Takeshi ^[1]

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1. Government Industrial Development Lab., Hokkaido, Sapporo (Japan)

The synthesis and the structure of silicon carbide-silicon nitride (SiC-Si[sub 3]N[sub 4]) composite ultrafine particles have been studied. SiC-Si[sub 3]N[sub 4] composite ultrafine particles were prepared by irradiating a SiH[sub 4], C[sub 2]H[sub 4], and NH[sub 3] gas mixture with a CO[sub 2] laser at atmospheric pressure. The composition of composite powders changed with the reactant gas flow rate. The carbon and nitrogen content of the powder could be controlled in a wide range from 0 to 30 wt%. The composite powder, which contained 25.3 wt% carbon and 5.8 wt% nitrogen, had a [beta]-SiC structure. As the nitrogen content increased, SiC decreased and amorphous phase, Si[sub 3]N[sub 4], Si appeared. The results of XPS and lattice constant measurements suggested that Si, C, and N atoms were intimately mixed in the composite particles.

• OSTI ID: 6460782
• Journal Information: Journal of the American Ceramic Society; (United States), Journal Name: Journal of the American Ceramic Society; (United States) Vol. 76:5; ISSN 0002-7820; ISSN JACTAW
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
360602 -- Other Materials-- Structure & Phase Studies
AMORPHOUS STATE
CARBIDES
CARBON COMPOUNDS
CARBON DIOXIDE LASERS
COHERENT SCATTERING
COMPOSITE MATERIALS
CRYSTAL STRUCTURE
DIFFRACTION
ELECTROMAGNETIC RADIATION
GAS LASERS
IRRADIATION
LASER RADIATION
LASERS
MATERIALS
MICROSTRUCTURE
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
POWDERS
RADIATIONS
SCATTERING
SILICON CARBIDES
SILICON COMPOUNDS
SILICON NITRIDES
SYNTHESIS
X-RAY DIFFRACTION