Hydrogen chemisorption and reaction on GaAs(100)

Journal Article · Thu Nov 01 04:00:00 EST 1990 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.576433· OSTI ID:6333184

Creighton, J R ^[1]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185 (USA)

We have studied the chemisorption of atomic hydrogen and deuterium on gallium-rich (4{times}6) and arsenic-rich {ital c}(2{times}8) GaAs(100) reconstructed surfaces using temperature programmed desorption (TPD). Molecular hydrogen (specifically D{sub 2}) desorption from the gallium-rich (4{times}6) surface exhibits a peak at 480--510 K, depending on the initial coverage. By comparing results from the different reconstructions we conclude that the desorption of molecular hydrogen primarily arises from surface GaH{sub {ital x}} species. The arsenic-rich {ital c}(2{times}8) surface yields a small amount of molecular hydrogen desorption around 660 K, apparently arising from surface AsH{sub {ital x}} species. In addition to molecular hydrogen, chemisorbed arsine is detected desorbing from both reconstructions around 330--340 K. This result indicates that atomic hydrogen can etch the GaAs surface. For the maximum exposure studied, {similar to}15% of the surface arsenic on the arsenic-rich {ital c}(2{times}8) surface is converted to arsine.

• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6333184
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 8:6; ISSN 0734-2101; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360603* -- Materials-- Properties
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
ACTIVATION ENERGY
ARSENIC COMPOUNDS
ARSENIDES
CHEMICAL REACTIONS
CHEMISORPTION
COHERENT SCATTERING
DEUTERIUM
DIFFRACTION
ELECTRON DIFFRACTION
ELEMENTS
ENERGY
ETCHING
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
HIGH TEMPERATURE
HYDROGEN
HYDROGEN ISOTOPES
ISOTOPES
KINETICS
LIGHT NUCLEI
NONMETALS
NUCLEI
ODD-ODD NUCLEI
PNICTIDES
SCATTERING
SEPARATION PROCESSES
SORPTION
SORPTIVE PROPERTIES
STABLE ISOTOPES
SURFACE FINISHING
SURFACE PROPERTIES
TEMPERATURE DEPENDENCE