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U.S. Department of Energy
Office of Scientific and Technical Information

Nb/sub 3/,Ge superconductive films grown with air

Patent ·
OSTI ID:6319430
A superconductive film of Nb/sub 3/Ge is produced by providing within a vacuum chamber a heated substrate and source of niobium and germanium, reducing the pressure within the chamber to a residual pressure no greater than about 10/sup -5/ mm Hg, introducing air into the resulting evacuated chamber in controlled amounts and vaporizing the niobium and germanium to deposit a film of Nb/sub 3/Ge on the heated substrate.
Assignee:
General Electric Company
Patent Number(s):
US 4129196
OSTI ID:
6319430
Country of Publication:
United States
Language:
English