Nb/sub 3/Ge superconductive films grown with air
Patent
·
OSTI ID:5905725
A superconductive film of Nb/sub 3/Ge is produced by providing within a vacuum chamber a heated substrate and sources of niobium and germanium, reducing the pressure within the chamber to a residual pressure no greater than about 10/sup -5/ mm Hg, introducing air into the resulting evacuated chamber in controlled amounts and vaporizing the niobium and germanium to deposit a film of Nb/sub 3/Ge on the heated substrate.
- Assignee:
- General Electric Company
- Patent Number(s):
- US 4154901
- OSTI ID:
- 5905725
- Country of Publication:
- United States
- Language:
- English
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