Nb/sub 3/Ge and Nb/sub 3/Sn films prepared by high-rate magnetron sputtering

Journal Article · Sun Jan 01 04:00:00 EST 1978 · Adv. Cryog. Eng.; (United States)

DOI:https://doi.org/10.1007/978-1-4613-9853-0_52· OSTI ID:6319409

Kampwirth, R T; Wu, C T; Hafstrom, J W

Magnetron sputtering has been shown to produce Nb/sub 3/Sn films with properties equal to or better than that produced by other techniques. Deposition rate for a given pressure was roughly proportional to the applied power and should be extendable beyond the present maximum of 0.5 ..mu..m/min. Control of the microstructure should be possible by manipulation of the sputtering parameters to optimize films for particular applications. Nb/sub 3/Ge films have been routinely produced with T/sub c/ > 20.5 K and as high as 21.5 K (> 22 K resistive onset), by adjusting the target composition and adding controlled amounts of impurity gas, such as oxygen. There is no reason to expect that higher T/sub c/ cannot be achieved with further refinements in technique. Future experiments will include the effects of pressure, substrate temperature and type, and deposition rate on J/sub c/(H,T).

• Research Organization: Argonne National Lab., IL
• OSTI ID: 6319409
• Journal Information: Adv. Cryog. Eng.; (United States), Journal Name: Adv. Cryog. Eng.; (United States) Vol. 24; ISSN ACYEA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
656102 -- Solid State Physics-- Superconductivity-- Acoustic
Electronic
Magnetic
Optical
& Thermal Phenomena-- (-1987)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALLOYS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
FABRICATION
FILMS
GERMANIUM ALLOYS
INTERMETALLIC COMPOUNDS
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NIOBIUM ALLOYS
NIOBIUM BASE ALLOYS
PHYSICAL PROPERTIES
SPUTTERING
SUPERCONDUCTIVITY
SUPERCONDUCTORS
TIN ALLOYS