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Reversibility of trapped hole annealing

Conference · · IEEE Trans. Nucl. Sci.; (United States)
OSTI ID:6318727
Annealing under negative bias of metal-oxide semiconductor field-effect transistors (MOSFETs) previously irradiated and annealed under positive bias is studied as a function of oxide field and time. Using three different sets of samples ranging from hard to soft, the authors have observed a considerable reversal of the oxide trapped charge component, ..delta..V/sub ot/, in the two harder sets and essentially no reversal in the soft set. The authors interpret these results in terms of electrons tunneling back and forth from the Si substrate to electron traps associated with a simple oxygen vacancy (an E' center) in the oxide. Some percentage of these compensating electrons do re-form the Si-Si bonds broken by the trapped holes. These results, along with their interpretation, are consistent with a large body of previous work. In addition, their data suggest that the energy level of the hole trap is below the valence band edge of Si.
Research Organization:
Harry Diamond Labs., U.S. Army LABCOM, Adelphi, MD (US)
OSTI ID:
6318727
Report Number(s):
CONF-880730-
Conference Information:
Journal Name: IEEE Trans. Nucl. Sci.; (United States) Journal Volume: 35:6
Country of Publication:
United States
Language:
English