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U.S. Department of Energy
Office of Scientific and Technical Information

Investigation of the hydrogenation of SiCl/sub 4/. Final report, March 31, 1979-April 1, 1981

Technical Report ·
DOI:https://doi.org/10.2172/6317606· OSTI ID:6317606
A two-year research and development program was initiated in April of 1979 to study the hydrochlorination of silicon tetrachloride and metallurgical grade (m.g.) silicon metal to trichlorosilane, 3 SiCl/sub 4/ + 2H/sub 2/ + Si in equilibrium 4 SiHCl/sub 3/. A laboratory scale pressure reactor was constructed to study this reaction at pressures up to 500 psig. Reaction kinetic measurements were carried out as a function of reactor pressure, reaction temperature and H/sub 2//SiCl/sub 4/ feed ratio. Based on the reaction kinetic data, the hydrochlorination of SiCl/sub 4/ and m.g. silicon metal is found to be an efficient process to produce SiHCl/sub 3/ in good conversions and in high yields. Copper is an effective catalyst. Results of a corrosion study show that conventional nickel-chromium alloys are suitable material of construction for the hydrochlorination reactor. The hydrochlorination reaction is relatively insensitive to external process parameters such as silicon particle size distribution and the impurities in the m.g. silicon metal.
Research Organization:
Massachusetts Inst. of Tech., Cambridge (USA)
Sponsoring Organization:
USDOE
DOE Contract Number:
NAS-7-100-955382
OSTI ID:
6317606
Report Number(s):
DOE/JPL/955382-79/8; ON: DE81025543
Country of Publication:
United States
Language:
English