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U.S. Department of Energy
Office of Scientific and Technical Information

Investigation of the hydrogenation of SiCl/sub 4/. Final report, 31 Mar 1979 - 1 Apr 1981

Technical Report ·
OSTI ID:5490046
A laboratory scale pressure reactor was constructed to study the 3 SiCl + 2H/sub 2/ + Si yields 4 SiHCl/sub 3/ reaction at pressures up to 500 psig. Reaction kinetic measurements were carried out as a function of reactor pressure, reaction temperature and H/sub 2//SiCl/sub 4/ feed ratio. Based on the reaction kinetic data, the hydroclorination of SiCl/sub 4/ and m.g. silicon metal is found to be an efficient process to produce SiHCl/sub 3/ in good conversions and in high yields. Copper is an effective catalyst. Results of the corrosion study show that conventional nickel chromium alloys are suitable material of construction for the hydrochlorination reactor. The hydrochlorination reaction is relatively insensitive to external process parameters such as silicon particle size distribution and the impurities in the m.g. silicon metal.
Research Organization:
Massachusetts Inst. of Tech., Cambridge (USA)
OSTI ID:
5490046
Report Number(s):
NASA-CR-164626
Country of Publication:
United States
Language:
English