Analytical investigation of plasma and electrode potentials in a diode-type r-f (radiofrequency) discharge
Electrical potentials of a plasma and both electrodes in a diode-type r-f discharge are analytically obtained under the assumptions of quasi-static electric fields in an ion sheath, low gas pressure, charge neutrality of the plasma, and eta <<1 (eas is the ratio of electrode areas). The dependence of dV/sub p/ D/dU/sub p/ (V/sub p/ D and U/sub p/ are the d-c part of the plasma potential and the potential difference between the plasma and the r-f power electrode, respectively) on eta is, then, compared with experimental results. The following conclusions are found: 1. The plasma potential does not necessarily have a simple harmonic form, even if the supplied RF power has that form. 2. The DC parts of the plasma potential and the RF power electrode potential change depending on the waveform of the supplied RF power, even if the RF amplitude and eta are kept constant. 3. -dV/sub p/ D/dU/sub p/ depends quadratically on eta, with a proportionality constant K which depends on the waveform of the supplied r-f power.
- Research Organization:
- Massachusetts Inst. of Tech., Cambridge (USA). Dept. of Chemistry
- OSTI ID:
- 6317412
- Report Number(s):
- AD-A-181065/4/XAB
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CHARGED PARTICLES
CURRENTS
DIRECT CURRENT
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ELECTRIC POTENTIAL
ELECTRICAL PROPERTIES
ELECTRODES
ETCHING
FLUIDS
GASES
IONS
LOW PRESSURE
PHYSICAL PROPERTIES
PLASMA SHEATH
SURFACE FINISHING