Radiofrequency sheath fields above a metal-dielectric interface

Journal Article · Mon Nov 01 04:00:00 EST 2004 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.1794901· OSTI ID:20662129

Barnat, E V; Hebner, G A ^[1]

---

1. Sandia National Laboratories, Albuquerque, New Mexico 87185-1423 (United States)

Two-dimensional maps of the sheath electric fields formed around a metal-dielectric interface were measured in a radio frequency (rf) argon plasma using laser-induced fluorescence-dip spectroscopy. Experimentally determined Stark shifts of the argon Rydberg 13d[3/2]{sub 1} state were used to quantify the electric fields in the sheath as functions of the rf cycle, voltage, and pressure. Both the structure of the sheath fields and the discharge characteristics in the region above the electrode depend on the discharge conditions and the configuration of the surface. Dissimilar materials placed adjacent to each other result in electric fields with a component parallel to the electrode surface.

• OSTI ID: 20662129
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 9 Vol. 96; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON
DIELECTRIC MATERIALS
ELECTRIC FIELDS
ELECTRIC POTENTIAL
ELECTRODES
FLUORESCENCE
HIGH-FREQUENCY DISCHARGES
INTERFACES
LASERS
METALS
PLASMA
PLASMA SHEATH
RADIOWAVE RADIATION
RYDBERG STATES
SPECTROSCOPY
STARK EFFECT
SURFACE POTENTIAL
TWO-DIMENSIONAL CALCULATIONS