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Cylindrical magnetron co-sputter etching of copper with applications for solar selective absorbing surfaces

Journal Article · · J. Vac. Sci. Technol.; (United States)
DOI:https://doi.org/10.1116/1.571100· OSTI ID:6304246
Solar selective absorbing surfaces have been produced on large areas of copper plate seeded by a flux of titanium in a cylindical magnetron co-sputter etching system. Surface oxide on the copper and the introduction of reactive gas during the etching were necessary for production of reproducible textured surfaces. The variation of optical properties and surface morphology as a function of sputter etching conditions has been studied. Optimum selective surfaces have absorptance ..cap alpha..approx.0.92 and emittance epsilonapprox.0.18 at 300 K. Both absorptance and emittance decrease slightly after annealing for thousands of hours at 500 /sup 0/C in vacuum.
Research Organization:
School of Physics, University of Sydney, Sydney, NSW, 2006, Australia
OSTI ID:
6304246
Journal Information:
J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 19:2; ISSN JVSTA
Country of Publication:
United States
Language:
English