In situ processing of epitaxial Y-Ba-Cu-O high T/sub c/ superconducting films on (100) SrTiO/sub 3/ and (100) YS-ZrO/sub 2/ substrates at 500--650 /sup 0/C
We report the formation of excellent quality epitaxial YBa/sub 2/Cu/sub 3/O/sub 7/ films on (100) SrTiO/sub 3/ and (100) ZrO/sub 2/ (yttria stabilized) substrates in the temperature range of 500--650 /sup 0/C by XECl excimer laser ablation in a 0.2 Torr oxygen ambient. By applying a dc bias voltage of +300 V to an interposing ring, we were able to reduce the substrate temperatures from 650 to 500 /sup 0/C for obtaining epitaxial films. The quality of the epitaxial films was found to decrease with temperature, particularly below 550 /sup 0/C. The thickness of the superconducting films was varied from 500 to 5000 A with superconducting transition temperatures T/sub c/ (zero resistance) varying from 87 to 90 K for 650 /sup 0/C deposits. The critical current density J/sub c/ of films was found to vary linearly with temperature with values of (zero magnetic field at 77 K) 5.0 x 10/sup 6/ and 1.0 x 10/sup 6/ for films deposited at 650 /sup 0/C on (100) SrTiO/sub 3/ and (100) yttria-stabilized zirconia substrates, respectively. X-ray diffraction, transmission electron microscopy, electron channeling patterns, and Rutherford backscattering (RBS)/channeling showed excellent epitaxial quality of films on both substrates with best values of minimum ion channeling yield of 3.5% on (100) SrTiO/sub 3/ substrates.
- Research Organization:
- Materials Science and Engineering Department, North Carolina State University, Raleigh, North Carolina 27695-7916
- OSTI ID:
- 6293843
- Journal Information:
- Appl. Phys. Lett.; (United States), Vol. 54:22
- Country of Publication:
- United States
- Language:
- English
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75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BARIUM OXIDES
SUPERCONDUCTIVITY
VAPOR PHASE EPITAXY
COPPER OXIDES
STRONTIUM OXIDES
VAPOR DEPOSITED COATINGS
SUPERCONDUCTING FILMS
FABRICATION
TITANIUM OXIDES
YTTRIUM OXIDES
ZIRCONIUM OXIDES
CRITICAL CURRENT
CURRENT DENSITY
EXCIMER LASERS
EXPERIMENTAL DATA
HIGH TEMPERATURE
LAYERS
LOW TEMPERATURE
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X-RAY DIFFRACTION
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COATINGS
COHERENT SCATTERING
COPPER COMPOUNDS
CURRENTS
DATA
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
EPITAXY
FILMS
GAS LASERS
INFORMATION
LASERS
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SCATTERING
STRONTIUM COMPOUNDS
THERMODYNAMIC PROPERTIES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
ZIRCONIUM COMPOUNDS
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656100 - Condensed Matter Physics- Superconductivity