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Title: In situ processing of epitaxial Y-Ba-Cu-O high T/sub c/ superconducting films on (100) SrTiO/sub 3/ and (100) YS-ZrO/sub 2/ substrates at 500--650 /sup 0/C

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.101520· OSTI ID:6293843

We report the formation of excellent quality epitaxial YBa/sub 2/Cu/sub 3/O/sub 7/ films on (100) SrTiO/sub 3/ and (100) ZrO/sub 2/ (yttria stabilized) substrates in the temperature range of 500--650 /sup 0/C by XECl excimer laser ablation in a 0.2 Torr oxygen ambient. By applying a dc bias voltage of +300 V to an interposing ring, we were able to reduce the substrate temperatures from 650 to 500 /sup 0/C for obtaining epitaxial films. The quality of the epitaxial films was found to decrease with temperature, particularly below 550 /sup 0/C. The thickness of the superconducting films was varied from 500 to 5000 A with superconducting transition temperatures T/sub c/ (zero resistance) varying from 87 to 90 K for 650 /sup 0/C deposits. The critical current density J/sub c/ of films was found to vary linearly with temperature with values of (zero magnetic field at 77 K) 5.0 x 10/sup 6/ and 1.0 x 10/sup 6/ for films deposited at 650 /sup 0/C on (100) SrTiO/sub 3/ and (100) yttria-stabilized zirconia substrates, respectively. X-ray diffraction, transmission electron microscopy, electron channeling patterns, and Rutherford backscattering (RBS)/channeling showed excellent epitaxial quality of films on both substrates with best values of minimum ion channeling yield of 3.5% on (100) SrTiO/sub 3/ substrates.

Research Organization:
Materials Science and Engineering Department, North Carolina State University, Raleigh, North Carolina 27695-7916
OSTI ID:
6293843
Journal Information:
Appl. Phys. Lett.; (United States), Vol. 54:22
Country of Publication:
United States
Language:
English

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