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Poly(arylsulfone imide) as E-beam resist: synthesis and radiolysis. Technical report

Technical Report ·
OSTI ID:6289424
Aromatic diamines containing -SO/sub 2/-and-S- moieties were used to prepare soluble polyimides with ditrifluoromethyl methane bis(phthalic anhydride) (F-series polyimides) and polyamic acid with pyromellitic dianhydride (P-series). Gamma radiolysis gave G(S) values for scission between 1 to 2 with no crosslinking. Significant weight loss occurred with radiolysis is attributable to efficient -SO/sub 2/-bond scission for the R-series polyimides, as well as imidization in the cases of P-series polyamic acids.
Research Organization:
Massachusetts Univ., Amherst (USA). Dept. of Polymer Science and Engineering
OSTI ID:
6289424
Report Number(s):
AD-A-201734/1/XAB; TR-13
Country of Publication:
United States
Language:
English