Poly(arylsulfone imide) as E-beam resist: synthesis and radiolysis. Technical report
Technical Report
·
OSTI ID:6289424
Aromatic diamines containing -SO/sub 2/-and-S- moieties were used to prepare soluble polyimides with ditrifluoromethyl methane bis(phthalic anhydride) (F-series polyimides) and polyamic acid with pyromellitic dianhydride (P-series). Gamma radiolysis gave G(S) values for scission between 1 to 2 with no crosslinking. Significant weight loss occurred with radiolysis is attributable to efficient -SO/sub 2/-bond scission for the R-series polyimides, as well as imidization in the cases of P-series polyamic acids.
- Research Organization:
- Massachusetts Univ., Amherst (USA). Dept. of Polymer Science and Engineering
- OSTI ID:
- 6289424
- Report Number(s):
- AD-A-201734/1/XAB; TR-13
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
38 RADIATION CHEMISTRY, RADIOCHEMISTRY, AND NUCLEAR CHEMISTRY
400600* -- Radiation Chemistry
ALKANES
AMINES
ANHYDRIDES
ARYL RADICALS
CHEMICAL RADIATION EFFECTS
CHEMICAL REACTIONS
CHEMISTRY
DECOMPOSITION
DOCUMENT TYPES
HYDROCARBONS
IMIDES
METHANE
ORGANIC COMPOUNDS
ORGANIC NITROGEN COMPOUNDS
ORGANIC SULFUR COMPOUNDS
POLYMERIZATION
POLYMERS
PROGRESS REPORT
RADIATION CHEMISTRY
RADIATION EFFECTS
RADICALS
RADIOLYSIS
SOLUBILITY
SULFONES
400600* -- Radiation Chemistry
ALKANES
AMINES
ANHYDRIDES
ARYL RADICALS
CHEMICAL RADIATION EFFECTS
CHEMICAL REACTIONS
CHEMISTRY
DECOMPOSITION
DOCUMENT TYPES
HYDROCARBONS
IMIDES
METHANE
ORGANIC COMPOUNDS
ORGANIC NITROGEN COMPOUNDS
ORGANIC SULFUR COMPOUNDS
POLYMERIZATION
POLYMERS
PROGRESS REPORT
RADIATION CHEMISTRY
RADIATION EFFECTS
RADICALS
RADIOLYSIS
SOLUBILITY
SULFONES