Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Negative charge emission due to excimer laser bombardment of sodium trisilicate glass

Journal Article · · Journal of Applied Physics; (USA)
DOI:https://doi.org/10.1063/1.346216· OSTI ID:6288737
; ;  [1];  [2]
  1. Physics Department, Washington State University, Pullman, WA (USA)
  2. Pacific Northwest Laboratories, Richland, WA (USA)

We describe measurements of negative charge emission accompanying irradiation of sodium trisilicate glass (Na{sub 2}O{center dot}3SiO{sub 2}) with 248-nm excimer laser light at fluences on the order of 2 J/cm{sup 2} per pulse, i.e., at the threshold for ablative etching of the glass surface. The negative charge emission consists of a very prompt photoelectron burst coincident with the laser pulse, followed by a much slower plume of electrons and negative ions traveling with a high density cloud of positive ions, previously identified as primarily Na{sup +}. Using combinations of {bold E} and {bold B} fields in conjunction with time-of-flight methods, the negative ions were successfully separated from the plume and tentatively identified as O{sup {minus}}, Si{sup {minus}}, NaO{sup {minus}}, and perhaps NaSi{sup {minus}}. These negative species are probably formed by gas phase collisions in the near-surface region which result in electron attachment.

OSTI ID:
6288737
Journal Information:
Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Journal Issue: 8 Vol. 68:8; ISSN 0021-8979; ISSN JAPIA
Country of Publication:
United States
Language:
English

Similar Records

The interaction of ultraviolet excimer laser light with sodium trisilicate
Journal Article · Fri Sep 01 00:00:00 EDT 1989 · Journal of Vacuum Science and Technology, A: Vacuum, Surfaces, and Films; (USA) · OSTI ID:5504731

Consequences of simultaneous exposure of inorganic solids to excimer laser light and an electron beam
Journal Article · Wed Aug 15 00:00:00 EDT 1990 · Journal of Applied Physics; (USA) · OSTI ID:6550989

Charge emission from silicon and germanium surfaces irradiated with KrF excimer laser pulses
Journal Article · Wed Oct 31 23:00:00 EST 1990 · Journal of Applied Physics; (USA) · OSTI ID:6287885