Coherent multilayer crystals and method of making

Patent · Thu Oct 30 00:00:00 EST 1980

OSTI ID:6270465

Schuller, I K; Falco, C M

A new material is described consisting of a coherent multilayer crystal of two or more elements where each layer is composed of a single element. Each layer may vary in thickness from about 2 A to 2500 A. The multilayer crystals are prepared by sputter deposition under conditions which slow the sputtered atoms to near substrate temperatures before they contact the substrate.

• DOE Contract Number: W-31-109-ENG-38
• Assignee: Dept. of Energy
• OSTI ID: 6270465
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
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GENERAL PHYSICS
SEMICONDUCTOR DEVICES
FABRICATION
SUPERCONDUCTING FILMS
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SUPERLATTICES
COPPER
CRYSTAL STRUCTURE
EPITAXY
LATTICE PARAMETERS
LAYERS
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