Superconducting YBa sub 2 Cu sub 3 O sub 7 minus x thin films on silver substrates by in situ plasma-enhanced metalorganic chemical vapor deposition

Journal Article · Mon Jan 07 04:00:00 EST 1991 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.104400· OSTI ID:6260229

Zhao, J; Li, Y Q; Chern, C S; Norris, P; Gallois, B; Kear, B; Wessels, B W ^[1]

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1. Emcore Corporation, 35 Elizabeth Avenue, Somerset, New Jersey 08873 (US)

An {ital in} {ital situ} microwave plasma-enhanced metalorganic chemical vapor deposition process was used to fabricate highly {ital c}-axis oriented YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} superconducting thin films on metallic Ag substrates. The films were deposited at a reduced substrate temperature of 740 {degree}C in about 270 Pa of N{sub 2}O ambient. Magnetic susceptibilities versus temperature of the as-deposited films show attainment of zero resistance of 85 K and composition of single (high {ital T}{sub {ital c}}) phase. X-ray diffraction measurements reveal that the films deposited at 740 {degree}C have highly preferential orientation of the crystallite {ital c} axes perpendicular to the substrate surface.

• OSTI ID: 6260229
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 58:1; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DIFFRACTION
FILMS
HIGH-TC SUPERCONDUCTORS
MAGNETIC PROPERTIES
MAGNETIC SUSCEPTIBILITY
ORGANIC COMPOUNDS
ORGANOMETALLIC COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SCATTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES