Epitaxially grown sputtered LaAlO sub 3 films

Journal Article · Mon Nov 05 04:00:00 EST 1990 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.104153· OSTI ID:6260220

Lee, A E; Platt, C E; Burch, J F; Simon, R W ^[1]; Goral, J P; Al-Jassim, M M ^[2]

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1. TRW Space Technology Group, Redondo Beach, CA (USA)
2. Solar Energy Research Institute, Golden, CO (USA)

We have grown crystalline thin films of LaAlO{sub 3} using off-axis rf sputtering from a single stoichiometric target. The films grow epitaxially on SrTiO{sub 3} and LaAlO{sub 3} (100) substrates as well as on YBa{sub 2}Cu{sub 3}O{sub 7} thin films. We report on the growth conditions used to make these films, the properties of the films, and the properties of bilayer and trilayer structures containing both LaAlO{sub 3} and YBa{sub 2}Cu{sub 3}O{sub 7} films. Transmission electron microscopy cross-sectional and x-ray diffraction analyses indicate that all the constituent films in the multilayers grow epitaxially and that the interfaces between the films are sharply defined. Preliminary transport measurements on these multilayers show that LaAlO{sub 3} can be used for dielectric layers in a variety of high-temperature superconductor electronic circuits.

• OSTI ID: 6260220
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 57:19; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
BORON COMPOUNDS
BORON OXIDES
CARBON COMPOUNDS
CARBON OXIDES
CHALCOGENIDES
EPITAXY
FILMS
HIGH-TC SUPERCONDUCTORS
LANTHANUM COMPOUNDS
LANTHANUM OXIDES
OXIDES
OXYGEN COMPOUNDS
RARE EARTH COMPOUNDS
SPUTTERING
STOICHIOMETRY
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES