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SiO/sub 2/ and Si/sub 3/N/sub 4/ passivation layers on Y-Ba-Cu-O thin films

Journal Article · · J. Appl. Phys.; (United States)
DOI:https://doi.org/10.1063/1.343848· OSTI ID:6257917
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High-/ital T//sub /ital c// Y-Ba-Cu-O superconductor thin films were passivatedwith thermally evaporated SiO/sub 2/ or rf magnetron sputtered Si/sub 3/N/sub 4/. Thermalevaporation of SiO/sub 2/ on the Y-Ba-Cu-O thin-film surface did not degrade thezero resistance temperature of Y-Ba-Cu-O films. A seriously lowered zeroresistance temperature of Y-Ba-Cu-O films was found if Si/sub 3/N/sub 4/ was sputteredonto the Y-Ba-Cu-O film surface. A one month exposure of the Y-Ba-Cu-O film tothe environmental air did not change the /ital T//sub /ital c// onset of thesuperconductor thin film but gave a slight decrease of /ital T//sub /ital c// zerowith SiO/sub 2/ as the surface passivation layer. High-frequency capacitance-voltagestudies were made on metal-insulator-superconductor to investigate the interfaceand surface properties of Ya-Ba-Cu-O thin films. The experimental data suggestedthat a very thin layer semiconductor phase Y-Ba-Cu-O was produced betweenY-Ba-Cu-O films and the insulator films during the deposition of the passivationfilm onto the Y-Ba-Cu-O surface.

Research Organization:
State University of New York at Buffalo, Department of Electrical and Computer Engineering, 217C Bonner Hall, Amherst, New York 14260(US)
OSTI ID:
6257917
Journal Information:
J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 66:1; ISSN JAPIA
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
360205* -- Ceramics
Cermets
& Refractories-- Corrosion & Erosion
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
FILMS
LAYERS
MATERIALS
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PASSIVATION
PHYSICAL PROPERTIES
PNICTIDES
SEMICONDUCTOR MATERIALS
SILICON COMPOUNDS
SILICON NITRIDES
SILICON OXIDES
SPUTTERING
SUPERCONDUCTORS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES