A simple specimen holder for EBIC imaging on the Hitachi S800

Journal Article · Wed Sep 01 04:00:00 EDT 1993 · Microscopy Research and Technique; (United States)

DOI:https://doi.org/10.1002/jemt.1070260214· OSTI ID:6254683

Zhang, Xiao ^[1]; Joy, D C ^[2]

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1. Univ. of Tennessee, Knoxville, TN (United States). Electron Microscope Facility
2. Oak Ridge National Lab., TN (United States)

Electron beam induced current (EBIC) technique has become widely used in the characterization of semiconductor materials and microelectronic devices. EBIC signals are measured in the form of a short circuit current, and this requires that both the front and the back surfaces of the specimen be electrically connected. The authors have developed a simple specimen holder to implement EBIC experiments on SEMs such as the Hitachi S800 which does not possess isolated electrical lead-outs. In this note the design of the specimen holder and illustrate the results by EBIC observations of polycrystalline silicon solar cells is discussed.

• OSTI ID: 6254683
• Journal Information: Microscopy Research and Technique; (United States), Journal Name: Microscopy Research and Technique; (United States) Vol. 26:2; ISSN MRTEEO; ISSN 1059-910X
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501 -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360602 -- Other Materials-- Structure & Phase Studies
42 ENGINEERING
420500* -- Engineering-- Materials Testing
BEAMS
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
DESIGN
DIRECT ENERGY CONVERTERS
DISLOCATIONS
ELECTRON BEAMS
ELECTRON MICROSCOPY
ELECTRONIC CIRCUITS
EQUIPMENT
GRAIN BOUNDARIES
LEPTON BEAMS
LINE DEFECTS
MATERIALS
MATERIALS TESTING
MICROSCOPES
MICROSCOPY
MICROSTRUCTURE
PARTICLE BEAMS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SAMPLE HOLDERS
SCANNING ELECTRON MICROSCOPY
SEMICONDUCTOR MATERIALS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
TESTING