Clockwise C-V hysteresis phenomena of metal--tantalum-oxide--silicon-oxide--silicon ( p) capacitors due to leakage current through tantalum oxide
Thermal tantalum oxide with a thickness of 620 A was studied. The dc leakage resistance and high-frequency (1-MHz) resistance of a metal--tantalum-oxide--silicon capacitor were found to be on the order of 10/sup 8/ and 1 ..cap omega.. cm/sup 2/, respectively. The C-V behavior of the capacitor, with its initial states being carefully treated, was reproduced and observed to be dependent on the return voltage and hold time (at return point) of the measurement conditions. And only negative charges were observed to be responsible for the conduction current through tantalum oxide. A model with the considerations of the ac equivalent circuit and low-frequency leakage characteristic of tantalum oxide was proposed for these observations. Theoretical examples, with their parameters being suitably given according to the measured data, were shown, and they explained the experimental observations quite well. It is found that the measurement conditions and effect of the ac resistance of tantalum oxide on the determination of flat-band capacitance are important and should be carefully considered when one is interpreting the interface charges from C-V curves.
- Research Organization:
- Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan, Republic of China
- OSTI ID:
- 6252597
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 62:10; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
CAPACITORS
CHALCOGENIDES
CURRENTS
DATA
ELECTRIC CONDUCTIVITY
ELECTRIC CONTACTS
ELECTRIC CURRENTS
ELECTRICAL EQUIPMENT
ELECTRICAL PROPERTIES
ELEMENTS
EQUIPMENT
EXPERIMENTAL DATA
HYSTERESIS
INFORMATION
LEAKAGE CURRENT
METALS
MINERALS
NUMERICAL DATA
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
REFRACTORY METAL COMPOUNDS
SEMIMETALS
SILICA
SILICON
SILICON COMPOUNDS
SILICON OXIDES
TANTALUM
TANTALUM COMPOUNDS
TANTALUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS