Compact scanning soft-x-ray microscope using a laser-produced plasma source and normal-incidence multilayer mirrors

Journal Article · Thu Jun 01 04:00:00 EDT 1989 · Opt. Lett.; (United States)

DOI:https://doi.org/10.1364/OL.14.000539· OSTI ID:6250115

Trail, J A; Byer, R L

We have constructed a scanning soft-x-ray microscope that uses a laser-produced plasma as the soft-x-ray source and normal-incidence multilayer-coated mirrors in a Schwarzschild configuration as the focusing optics. The microscope operates at a wavelength of 14 nm, has a spatial resolution of 0.5 ..mu..m, and has a soft-x-ray photon flux through the focus of 10/sup 4/ sec/sup /minus/1/ when operated with only 170 mW of average laser power. The microscope is compact; the complete system, including the laser, fits on a single optical table.

• Research Organization: Department of Applied Physics, Ginzton Laboratory, Stanford University, Stanford, California 94305(US)
• OSTI ID: 6250115
• Journal Information: Opt. Lett.; (United States), Journal Name: Opt. Lett.; (United States) Vol. 14:11; ISSN OPLED
• Country of Publication: United States
• Language: English

Related Subjects

440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
COATINGS
DESIGN
DIMENSIONS
ELECTROMAGNETIC RADIATION
EQUIPMENT
IONIZING RADIATIONS
LASER-PRODUCED PLASMA
LIGHT SOURCES
MICROSCOPES
MIRRORS
OPERATION
PLASMA
RADIATION SOURCES
RADIATIONS
RESOLUTION
SOFT X RADIATION
SPATIAL RESOLUTION
X RADIATION
X-RAY EQUIPMENT