Semiconductor laser having an etched mirror and a narrow stripe width, with an integrated photodetector
Patent
·
OSTI ID:6209693
In an integrated optical semiconductor device wherein a stripe geometry laser diode is separated from a photodetector by an etched groove, the stripe region has a smaller width, such as 2 to 3 microns, than a carrier generating region of the photodetector. The stripe region is preferably rendered thicker than the carrier generating region, in which case the carrier generating region is more preferably made of a seimconductor material having a narrower band gap than the material of the stripe region. The stripe region may be defined by a buried mesa structure. Alternatively, the stripe region may be bounded transversely of a pair of heterojunctions therefor by a pair of channel-shaped regions of a semiconductor material having a wider bank gap than the material of the stripe region. In this event, the carrier generating region is divided into three parts by extensions of the channel-shaped regions. Most preferably, the carrier generating region has a light receiving end which is not parallel to a light emitting end of the stripe region. The light receiving end may be cylindrical.
- Assignee:
- Nippon Electric Co., Ltd. (Japan)
- Patent Number(s):
- US 4470143
- OSTI ID:
- 6209693
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
DESIGN
ELECTROMAGNETIC RADIATION
ELECTRONIC CIRCUITS
ETCHING
INTEGRATED CIRCUITS
LASER MIRRORS
LASERS
MATERIALS
MICROELECTRONIC CIRCUITS
MIRRORS
PHOTODETECTORS
PHOTODIODES
RADIATIONS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES
SEMICONDUCTOR LASERS
SEMICONDUCTOR MATERIALS
SURFACE FINISHING
VISIBLE RADIATION
420300* -- Engineering-- Lasers-- (-1989)
DESIGN
ELECTROMAGNETIC RADIATION
ELECTRONIC CIRCUITS
ETCHING
INTEGRATED CIRCUITS
LASER MIRRORS
LASERS
MATERIALS
MICROELECTRONIC CIRCUITS
MIRRORS
PHOTODETECTORS
PHOTODIODES
RADIATIONS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES
SEMICONDUCTOR LASERS
SEMICONDUCTOR MATERIALS
SURFACE FINISHING
VISIBLE RADIATION