Nucleation of body-centered-cubic tantalum films with a thin niobium underlayer
Journal Article
·
· J. Vac. Sci. Technol., A; (United States)
We discuss the structural and electrical properties of high-quality Ta films prepared by ion beam sputter deposition. The Ta films grow in two different crystal structures, body-centered-cubic (bcc) or tetragonal (..beta..-Ta), depending on the substrate preparation and sputtering conditions. Ta films deposited on a thin (>0.3 nm) Nb underlayer grow in the bcc crystal structure with properties approaching those of clean bulk polycrystalline material. The bcc-Ta films have a superconducting transition temperature of 4.3 K and a low-temperature (10 K) resistivity rho--6 ..mu cap omega.. cm. Ta films deposited without a Nb underlayer on Si substrates always grow in the tetragonal (..beta..-Ta) structure. The ..beta..-Ta films do not superconduct above 1 K and have a high resistivity rho--150 ..mu cap omega.. cm. X-ray diffraction and transmission electron microscope studies of both Ta structures are presented. Both bcc-Ta and ..beta..-Ta films are deposited on room-temperature substrates. This allows either type of film to be easily patterned by standard photoresist liftoff methods.
- Research Organization:
- Section of Applied Physics, Yale University, New Haven, Connecticut 06520
- OSTI ID:
- 6199270
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 5:6; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360101 -- Metals & Alloys-- Preparation & Fabrication
360102 -- Metals & Alloys-- Structure & Phase Studies
360104* -- Metals & Alloys-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BCC LATTICES
COATINGS
COHERENT SCATTERING
CRYSTAL LATTICES
CRYSTAL STRUCTURE
CUBIC LATTICES
DATA
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON MICROSCOPY
ELEMENTS
EXPERIMENTAL DATA
FABRICATION
FILMS
INFORMATION
METALS
MICROSCOPY
NIOBIUM
NUMERICAL DATA
PHYSICAL PROPERTIES
SCATTERING
SPUTTERING
SUPERCONDUCTING FILMS
TANTALUM
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION
360101 -- Metals & Alloys-- Preparation & Fabrication
360102 -- Metals & Alloys-- Structure & Phase Studies
360104* -- Metals & Alloys-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BCC LATTICES
COATINGS
COHERENT SCATTERING
CRYSTAL LATTICES
CRYSTAL STRUCTURE
CUBIC LATTICES
DATA
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON MICROSCOPY
ELEMENTS
EXPERIMENTAL DATA
FABRICATION
FILMS
INFORMATION
METALS
MICROSCOPY
NIOBIUM
NUMERICAL DATA
PHYSICAL PROPERTIES
SCATTERING
SPUTTERING
SUPERCONDUCTING FILMS
TANTALUM
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION