Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films. [C; graphite]
- Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)
The graphite macroparticle filtering efficiency of three different magnetic filter designs (straight duct, toroidal duct, and 90[degree] free-standing solenoid) used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon (ta-C) films was investigated. The particle contents in the coatings were measured using scanning electron microscopy (SEM) technique. In addition, during the ta-C deposition, long time exposure photographs were taken to see the graphite macroparticle trajectories and thus to qualitatively evaluate the filtering performance of different magnetic filters. The particle density measurements from the SEM images show that the filtering efficiency of the 90[degree] free-standing solenoid design is 13 times better than the filtering efficiency of the straight duct design. However, the toroidal duct design had only 3 times higher filtering efficiency compared to the straight duct design. [copyright] [ital 1999 American Vacuum Society.]
- OSTI ID:
- 6192177
- Journal Information:
- Journal of Vacuum Science and Technology, A, Vol. 17:5; ISSN 0734-2101
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
AMORPHOUS STATE
CARBON
DESIGN
ELECTRIC ARCS
GRAPHITE
MAGNETIC FILTERS
PARTICLE SIZE
SCANNING ELECTRON MICROSCOPY
THIN FILMS
CURRENTS
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ELECTRON MICROSCOPY
ELEMENTS
FILMS
FILTERS
MICROSCOPY
MINERALS
NONMETALS
SIZE
360601* - Other Materials- Preparation & Manufacture
661200 - Techniques of General Use in Physics- (1992-)