Crystalline state and acoustic properties of zinc oxide films

Journal Article · Mon Aug 01 04:00:00 EDT 1988 · Inorg. Mater. (Engl. Transl.); (United States)

OSTI ID:6182970

Kal'naya, G I; Pryadko, I F; Yarovoi, Yu A

We study the effect of the crystalline state of zinc oxide films, prepared by magnetron sputtering, on the efficiency of SAW transducers based on the layered system textured ZnO film-interdigital transducer (IDT)-fused quartz substrate. The crystalline perfection of the ZnO films was studied by the x-ray method using a DRON-2.0 diffractometer. The acoustic properties of the layered system fused quartz substrate-IDT-zinc oxide film were evaluated based on the squared electromechanical coupling constant K/sup 2/ for strip filters. It was found that K/sup 2/ depends on the magnitude of the mechanical stresses. When zinc oxide films are deposited by the method of magnetron deposition on fused quartz substrates, depending on the process conditions limitations can arise on the rate of deposition owing to mechanical stresses, which significantly degrade the efficiency of SAW transducers based on them, in the ZnO films.

• OSTI ID: 6182970
• Journal Information: Inorg. Mater. (Engl. Transl.); (United States), Journal Name: Inorg. Mater. (Engl. Transl.); (United States) Vol. 24:3; ISSN INOMA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ACOUSTICS
CHALCOGENIDES
COHERENT SCATTERING
COUPLING CONSTANTS
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
DEPOSITION
DIFFRACTION
EFFICIENCY
ELECTRONS
ELEMENTARY PARTICLES
FERMIONS
FILMS
FINE STRUCTURE
LEPTONS
MATERIALS TESTING
OXIDES
OXYGEN COMPOUNDS
PHYSICAL RADIATION EFFECTS
PRECESSION
RADIATION EFFECTS
SCATTERING
SPUTTERING
STRESS ANALYSIS
TESTING
THIN FILMS
TRANSDUCERS
X-RAY DIFFRACTION
ZINC COMPOUNDS
ZINC OXIDES