pH-sensitive ion-selective field-effect transistor with zirconium dioxide film

Journal Article · Tue Sep 20 00:00:00 EDT 1988 · J. Appl. Chem. USSR (Engl. Transl.); (United States)

OSTI ID:6176887

Vlasov, Yu G; Bratov, A V; Tarantov, Yu A; Andreev, S N; Bruzhas, I A; Gechis, V M; Pauzha, A S; Rozga, R Yu

Miniature semiconductor pH sensors for liquid media, i.e., ion-selective field-effect transistors (ISFETs), are silicon field-effect transistors with a two-layer dielectric consisting of a passivating SiO/sub 2/ layer adjoining the silicon and a layer of pH-sensitive material in contact with the electrolyte solution to be tested. This study was devoted to the characteristics of pH-sensitive ISFETs with ZrO/sub 2/ films. The base was p-type silicon (KDB-10) with a (100) surface orientation. A ZrO/sub 2/ layer 10-50 nm thick was applied over the SiO/sub 2/ layer by electron-beam deposition. The measurements were made in aqueous KNO/sub 3/ or KCl solutions.

• Research Organization: A. A. Zhdanov Leningrad State Univ. (USSR)
• OSTI ID: 6176887
• Journal Information: J. Appl. Chem. USSR (Engl. Transl.); (United States), Vol. 61:4; Other Information: Translated from Zh. Prikl. Khim.; 61: No. 4, 767-771(Apr 1988)
• Country of Publication: United States
• Language: English

Related Subjects

47 OTHER INSTRUMENTATION
37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
ELECTROLYTES
PH VALUE
FIELD EFFECT TRANSISTORS
PERFORMANCE
ZIRCONIUM OXIDES
ION EXCHANGE
ELECTROCHEMISTRY
FABRICATION
FILMS
ION-SELECTIVE ELECTRODES
MEASURING INSTRUMENTS
N-TYPE CONDUCTORS
P-TYPE CONDUCTORS
POTASSIUM CHLORIDES
POTASSIUM NITRATES
SENSITIVITY
SILICON
ALKALI METAL COMPOUNDS
CHALCOGENIDES
CHEMISTRY
CHLORIDES
CHLORINE COMPOUNDS
ELECTRODES
ELEMENTS
HALIDES
HALOGEN COMPOUNDS
MATERIALS
NITRATES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
POTASSIUM COMPOUNDS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR MATERIALS
SEMIMETALS
TRANSISTORS
TRANSITION ELEMENT COMPOUNDS
ZIRCONIUM COMPOUNDS
440300* - Miscellaneous Instruments- (-1989)
400201 - Chemical & Physicochemical Properties
400400 - Electrochemistry