pH-sensitive ion-selective field-effect transistor with zirconium dioxide film
Journal Article
·
· J. Appl. Chem. USSR (Engl. Transl.); (United States)
OSTI ID:6176887
Miniature semiconductor pH sensors for liquid media, i.e., ion-selective field-effect transistors (ISFETs), are silicon field-effect transistors with a two-layer dielectric consisting of a passivating SiO/sub 2/ layer adjoining the silicon and a layer of pH-sensitive material in contact with the electrolyte solution to be tested. This study was devoted to the characteristics of pH-sensitive ISFETs with ZrO/sub 2/ films. The base was p-type silicon (KDB-10) with a (100) surface orientation. A ZrO/sub 2/ layer 10-50 nm thick was applied over the SiO/sub 2/ layer by electron-beam deposition. The measurements were made in aqueous KNO/sub 3/ or KCl solutions.
- Research Organization:
- A. A. Zhdanov Leningrad State Univ. (USSR)
- OSTI ID:
- 6176887
- Journal Information:
- J. Appl. Chem. USSR (Engl. Transl.); (United States), Journal Name: J. Appl. Chem. USSR (Engl. Transl.); (United States) Vol. 61:4; ISSN JAPUA
- Country of Publication:
- United States
- Language:
- English
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·
OSTI ID:10114381
Related Subjects
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
400400 -- Electrochemistry
440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
ALKALI METAL COMPOUNDS
CHALCOGENIDES
CHEMISTRY
CHLORIDES
CHLORINE COMPOUNDS
ELECTROCHEMISTRY
ELECTRODES
ELECTROLYTES
ELEMENTS
FABRICATION
FIELD EFFECT TRANSISTORS
FILMS
HALIDES
HALOGEN COMPOUNDS
ION EXCHANGE
ION-SELECTIVE ELECTRODES
MATERIALS
MEASURING INSTRUMENTS
N-TYPE CONDUCTORS
NITRATES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
P-TYPE CONDUCTORS
PERFORMANCE
PH VALUE
POTASSIUM CHLORIDES
POTASSIUM COMPOUNDS
POTASSIUM NITRATES
SEMICONDUCTOR DEVICES
SEMICONDUCTOR MATERIALS
SEMIMETALS
SENSITIVITY
SILICON
TRANSISTORS
TRANSITION ELEMENT COMPOUNDS
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES
400201 -- Chemical & Physicochemical Properties
400400 -- Electrochemistry
440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
ALKALI METAL COMPOUNDS
CHALCOGENIDES
CHEMISTRY
CHLORIDES
CHLORINE COMPOUNDS
ELECTROCHEMISTRY
ELECTRODES
ELECTROLYTES
ELEMENTS
FABRICATION
FIELD EFFECT TRANSISTORS
FILMS
HALIDES
HALOGEN COMPOUNDS
ION EXCHANGE
ION-SELECTIVE ELECTRODES
MATERIALS
MEASURING INSTRUMENTS
N-TYPE CONDUCTORS
NITRATES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
P-TYPE CONDUCTORS
PERFORMANCE
PH VALUE
POTASSIUM CHLORIDES
POTASSIUM COMPOUNDS
POTASSIUM NITRATES
SEMICONDUCTOR DEVICES
SEMICONDUCTOR MATERIALS
SEMIMETALS
SENSITIVITY
SILICON
TRANSISTORS
TRANSITION ELEMENT COMPOUNDS
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES