Apparatus for irradiating a specimen by an electron beam
Patent
·
OSTI ID:6168325
A specimen chamber in which a specimen to be irradiated by an electron beam is evacuated by an evacuation device is described. The evacuation device includes a nonvaporative bulk getter vacuum pump and an oil rotary pump. The oil rotary pump is used for evacuating the specimen chamber from the atmospheric pressure to 10/sup -1/ to 10/sup -2/ torr, while the nonvaporative bulk getter vacuum pump is used for continuously evacuating the specimen chamber to 10/sup -5/ to 10/sup -6/ torr. The steady vacuum of 10/sup -5/ to 10/sup -6/ torr is maintained by only the nonvaporative bulk getter vacuum pump.
- Assignee:
- Hitachi, Ltd.
- Patent Number(s):
- US 4139774
- OSTI ID:
- 6168325
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
07 ISOTOPE AND RADIATION SOURCES
070201 -- Radiation Sources-- Design
Fabrication & Operation
42 ENGINEERING
420200* -- Engineering-- Facilities
Equipment
& Techniques
BEAMS
DESIGN
ELECTRON BEAMS
GETTERS
HIGH VACUUM
IRRADIATION DEVICES
LABORATORY EQUIPMENT
LEPTON BEAMS
PARTICLE BEAMS
PUMPS
VACUUM PUMPS
070201 -- Radiation Sources-- Design
Fabrication & Operation
42 ENGINEERING
420200* -- Engineering-- Facilities
Equipment
& Techniques
BEAMS
DESIGN
ELECTRON BEAMS
GETTERS
HIGH VACUUM
IRRADIATION DEVICES
LABORATORY EQUIPMENT
LEPTON BEAMS
PARTICLE BEAMS
PUMPS
VACUUM PUMPS