Differentially pumped low-energy ion beam system for an ultrahigh-vacuum atom-probe field-ion microscope

Journal Article · Sat Sep 01 04:00:00 EDT 1979 · Rev. Sci. Instrum.; (United States)

DOI:https://doi.org/10.1063/1.1135998· OSTI ID:6060064

Amano, J; Seidman, D N

An ultrahigh-vacuum (UHV) differentially pumped low-energy (50--3000 eV) ion beam system for the in situ irradiation of specimens in a UHV atom-probe field-ion microscope (FIM) was designed and constructed. The ion beam system consisted of a Finkelstein-type ion source, an Einzel lens, and a magnetic mass analyzer. The ion source was connected to the analyzer chamber by small apertures which resulted in differential pumping between the ion source and the analyzer chamber; during a typical in situ irradiation of a specimen in the atom-probe FIM the total pressure was maintained at approx. =10/sup -7/ Torr. In the case of helium ion irradiation the optimum ion-current density was approx. =0.5 ..mu..A cm/sup -2/ for 300-eV He/sup +/ ions at the atom-probe FIM specimen. After the completion of a helium ion irradiation the pumpdown time from 5 x 10/sup -7/ to approx. =3 x 10/sup -10/ Torr in the atom-probe FIM chamber was 0.5 h.

• Research Organization: Department of Materials Science and Engineering and the Materials Science Center, Bard Hall, Cornell University, Ithaca, New York 14853
• OSTI ID: 6060064
• Journal Information: Rev. Sci. Instrum.; (United States), Journal Name: Rev. Sci. Instrum.; (United States) Vol. 50:9; ISSN RSINA
• Country of Publication: United States
• Language: English

Related Subjects

440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
APERTURES
ATOMS
BEAM ANALYZERS
BEAMS
HIGH VACUUM
ION BEAMS
ION MICROSCOPES
ION SOURCES
IRRADIATION
LABORATORY EQUIPMENT
MAGNETIC ANALYZERS
MASS SPECTROMETERS
MEASURING INSTRUMENTS
MICROSCOPES
OPENINGS
PROBES
PUMPS
SPECTROMETERS
ULTRAHIGH VACUUM
VACUUM PUMPS