Apparatus for irradiation with charged particle beams

Patent · Tue Oct 23 00:00:00 EDT 1984

OSTI ID:6166240

Tamura, H; Ishitani, T; Shimase, A

An apparatus according to the present invention for irradiating a specimen with charged particle beams comprises a single charged particle generating source from which the charged particle beams formed of electrons and negative ions, respectively, can be simultaneously derived; a specimen holder on which the specimen is placed; and charged particle irradiation means which is interposed between the charged particle generating source and the specimen holder in order to focus the charged particle beams and to irradiate the surface of the specimen with the focused beams, and which includes at least one magnetic lens and at least one electrostatic lens that are individually disposed.

• Assignee: Hitachi Ltd. (Japan)
• Patent Number(s): US 4479060
• OSTI ID: 6166240
• Country of Publication: United States
• Language: English

Related Subjects

560153* -- Radiation Effects on Animals-- Invertebrates-- (-1987)
63 RADIATION, THERMAL, AND OTHER ENVIRON. POLLUTANT EFFECTS ON LIVING ORGS. AND BIOL. MAT.
ANIMAL TISSUES
ANIMALS
ARTHROPODS
BEAMS
BEETLES
BODY
CATHODE RAY TUBES
CHARGED PARTICLES
COLEOPTERA
ELECTRON BEAMS
ELECTRON TUBES
ELECTROSTATICS
INSECTS
INVERTEBRATES
IRRADIATION
IRRADIATION DEVICES
LENSES
LEPTON BEAMS
MAGNETIC FIELDS
PARTICLE BEAMS
RADIATION SOURCES
TISSUES