Transmission-type charged particle beam apparatus
A transmission-type charged particle beam apparatus comprising a vacuum envelope enclosing, first means, having at least ten individual charged particle sources to separately produce at least ten individual charged particle beams, second means to supporting a specimen to be investigated; third means to project each of the beams along a different beam path through a predetermined region of the specimen, the beam paths collectively converging about a rotational axis of symmetry at equal angles of at least 30* so as to intersect at an apex lying within the predetermined region of said specimen, individual particle detectors for each beam, and a particle optics lens system to focus each of the beams transmitted through the specimen onto a corresponding one of the particle detectors for separate detection of each beam, the lens system having at least one particle optics lens with an annular apertured pole structure to produce for each beam a deflecting field limited to a respective radial and circumferential area of the pole structure.
- Assignee:
- Planck-Gesellschaft, Max- (Germany, Federal Republic Of)
- Patent Number(s):
- US 4209698
- OSTI ID:
- 5709235
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
430200* -- Particle Accelerators-- Beam Dynamics
Field Calculations
& Ion Optics
AXIAL SYMMETRY
BEAM OPTICS
BEAM SHAPING
BEAMS
CHARGED PARTICLES
DETECTION
ELECTRON MICROSCOPY
FOCUSING
MICROSCOPY
OPTICAL SYSTEMS
STABILIZATION
SYMMETRY
TRANSMISSION ELECTRON MICROSCOPY
VACUUM SYSTEMS