Selective deposition of copper on poly(tetrafluoroethylene)
- Sandia National Labs., Albuquerque, NM (United States)
- New Mexico Univ., Albuquerque, NM (United States)
An additive three step process has been developed for patterned deposition of Cu onto poly(tetrafluoroethylene) (PTFE). The first step involves patterned irradiation with X-rays or electrons which is thought to cross link the PTFE surface; step two involves chemical etching with the result that only the non-irradiated areas are etched; and step three involves selective chemical vapor deposition (CVD) of Cu onto the etched surface at 200 C using (hexafluoroacetylacetonato)Cu(I) trimethylphosphine ((hfac)Cu(PMe{sub 3})). The non-irradiated areas of the surface are covered by a continuous, dense Cu film with X-ray photoelectron spectra show to contain only surface impurities that are easily removed by a short Ar ion sputter. The irradiated areas show the presence of only C and F, characteristic of PTFE.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE; USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 6121052
- Report Number(s):
- SAND-91-2263C; CONF-9110301-1; ON: DE92003949
- Resource Relation:
- Conference: Advanced metallization for ULSI applications conference, Newark, NJ (United States), 7-19 Oct 1991
- Country of Publication:
- United States
- Language:
- English
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Patterned deposition of copper on poly(tetrafluoroethylene)
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Related Subjects
COPPER
CHEMICAL VAPOR DEPOSITION
POLYTETRAFLUOROETHYLENE
COATINGS
CROSS-LINKING
IRRADIATION
PHYSICAL RADIATION EFFECTS
X RADIATION
CHEMICAL COATING
CHEMICAL REACTIONS
DEPOSITION
ELECTROMAGNETIC RADIATION
ELEMENTS
FLUORINATED ALIPHATIC HYDROCARBONS
HALOGENATED ALIPHATIC HYDROCARBONS
IONIZING RADIATIONS
METALS
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
ORGANIC POLYMERS
POLYETHYLENES
POLYMERIZATION
POLYMERS
POLYOLEFINS
RADIATION EFFECTS
RADIATIONS
SURFACE COATING
TRANSITION ELEMENTS
360101* - Metals & Alloys- Preparation & Fabrication
360601 - Other Materials- Preparation & Manufacture
360605 - Materials- Radiation Effects