Thickness determination of metal thin films with spectroscopic ellipsometry for x-ray mirror and multilayer applications. [Au; Pt; Pd; Cr; W; Cu]

Journal Article · Wed Sep 01 04:00:00 EDT 1999 · Journal of Vacuum Science and Technology, A

DOI:https://doi.org/10.1116/1.581939· OSTI ID:6115435

Liu, C; Erdmann, J; Maj, J; Macrander, A ^[1]

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1. Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439 (United States)

Sputtered thin film and multilayer x-ray mirrors are made at the Advanced Photon Source (APS) deposition lab for the APS users. Film thickness calibrations are carried out using [ital in situ] and [ital ex situ] spectroscopic ellipsometry, interferometry, and x-ray reflectometry. Here, we present a systematic study of thickness and optical constant determination of sputtered thin films of Au, Pt, Pd, Rh, Cr, Cu, as well as W and C, using [ital in situ] ellipsometry. Multiple data sets were obtained for each film material with incremental thicknesses and were analyzed with their correlation in mind. Results are compared with those obtained from interferometry and x-ray reflectivity measurements. The applications and limitations of spectroscopic ellipsometry for metal thin films are discussed. Observations of a relaxation effect of a Rh/Si film and a difference in growth mode in the Cr/Si system compared with other metal/Si systems are presented. [copyright] [ital 1999 American Vacuum Society.]

• OSTI ID: 6115435
• Journal Information: Journal of Vacuum Science and Technology, A, Journal Name: Journal of Vacuum Science and Technology, A Vol. 17:5; ISSN 0734-2101; ISSN JVTAD6
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104* -- Metals & Alloys-- Physical Properties
665100 -- Nuclear Techniques in Condensed Matter Physics -- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ADVANCED PHOTON SOURCE
CARBON
CHROMIUM
COPPER
DIMENSIONS
ELEMENTS
ELLIPSOMETRY
EQUIPMENT
FILMS
GOLD
MEASURING METHODS
METALS
MIRRORS
NONMETALS
PALLADIUM
PLATINUM
PLATINUM METALS
RADIATION SOURCES
RHODIUM
SEMIMETALS
SILICON
SYNCHROTRON RADIATION SOURCES
THICKNESS
THIN FILMS
TRANSITION ELEMENTS
TUNGSTEN
X-RAY EQUIPMENT