Temperature effects on structure and optical properties of radio-frequency sputtered VO/sub 2/
Vanadium dioxide undergoes a first-order phase transformation near 67 /sup 0/C. This phase transformation is accompanied by significant changes in optical properties. The most pronounced changes occur between IR wavelengths of 2 and 12 ..mu..m; therefore, thin films of this material appear very attractive for uses in IR optical switching devices. By knowing the effects that deposition temperature has on the optical properties and relating these properties to the film microstructure, a process for fabricating films with optimal properties and desired microstructure can be developed. Vanadium oxide films were deposited on sapphire substrates by rf magnetron sputtering. At deposition temperatures of 350 /sup 0/C, polycrystalline films were observed. X-ray diffraction analysis indicated VO/sub 2/ and V/sub 4/O/sub 7/ to be the phases present, and optical characterization showed a contrast in transmission of <20% between the switched and unswitched states. As the deposition temperature was increased, dendritic growth was observed. Film composition was VO/sub 2/ and V/sub 6/O/sub 11/ when the deposition temperature was 500 /sup 0/C with improved optical properties at higher deposition temperatures. The changes in optical properties, microstructure, and composition shows the dependence that vanadium oxide has on the deposition temperature.
- Research Organization:
- School of Engineering and Physical Sciences, Materials Processing Center, Wilkes College, Wilkes-Barre, Pennsylvania 18766
- OSTI ID:
- 6115184
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 7:3; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
CHALCOGENIDES
COHERENT SCATTERING
CRYSTAL STRUCTURE
CRYSTALS
DEPOSITION
DIFFRACTION
FILMS
HEAT TREATMENTS
HIGH TEMPERATURE
INFRARED SPECTRA
MICROSTRUCTURE
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
POLYCRYSTALS
SCATTERING
SPECTRA
SPUTTERING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
VANADIUM COMPOUNDS
VANADIUM OXIDES
X-RAY DIFFRACTION