Ion bombardment energy distributions in radio-frequency glow-discharge systems

Journal Article · Sat Mar 15 04:00:00 EST 1986 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.336417· OSTI ID:6097791

Thompson, B E; Allen, K D; Richards, A D; Sawin, H H

The measurement and interpretation of ion bombardment energies in rf discharges of SF/sub 6/, CF/sub 3/Cl, and CF/sub 3/Br from 0.2 to 1.0 Torr, are discussed. Errors in ion sampling due to disturbances of the electric field and neutral density around the sampling orifice are shown to be most important at higher pressures and with larger orifices. The dependence of the ion bombardment energy distribution on the electric-field-to-pressure ratio is reviewed. Combining this relation with a simple electrical model of a plasma gives estimates of the ion bombardment energies in collisional sheaths. The bombardment energy is proportional to (RF current)/(electrode area x frequency x pressure) with the proportionality constant for a particular system depending on the collision cross sections and relative ion-to-neutral mass ratio. The constants found for the three gases studied experimentally are close to theoretical estimates.

• Research Organization: Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, Massachussetts 02139
• OSTI ID: 6097791
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 59:6; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

640304* -- Atomic
Molecular & Chemical Physics-- Collision Phenomena
74 ATOMIC AND MOLECULAR PHYSICS
BEAM-PLASMA SYSTEMS
BEAMS
BROMINE COMPOUNDS
CARBON COMPOUNDS
CARBON FLUORIDES
CHLORINE COMPOUNDS
COLLISIONS
ELECTRIC DISCHARGES
ENERGY SPECTRA
FLUORIDES
FLUORINE COMPOUNDS
GLOW DISCHARGES
HALIDES
HALOGEN COMPOUNDS
HIGH-FREQUENCY DISCHARGES
ION BEAMS
ION COLLISIONS
ION-MOLECULE COLLISIONS
MOLECULE COLLISIONS
PLASMA SHEATH
SPECTRA
SULFUR COMPOUNDS
SULFUR FLUORIDES