Hydrogen ion beam smoothening of Ge(001)

Journal Article · Tue Jan 01 04:00:00 EST 1991 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.347758· OSTI ID:6096981

Horn, K M; Tsao, J Y; Chason, E; Brice, D K; Picraux, S T ^[1]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185 (US)

Low-energy hydrogen ion beams are shown to clean and rapidly smoothen Ge(001) surfaces that have been subjected to severe oxygen roughening. Characteristic smoothening times of 1000 s are found at 500 {degree}C for 200 to 600 eV hydrogen ion beams at fluxes of 200 nA/cm{sup 2}. By comparing hydrogen and noble gas ion bombardment at various temperatures, we show that the hydrogen ion smoothening effect consists of both physical and chemical mechanisms which act to free pinned surface sites of contaminants and enable subsequent thermal smoothening of the germanium surface. Such oxygen roughened surfaces can be recovered to a state suitable for epitaxial growth without resorting to high-temperature annealing, keV ion sputtering or additional growth.

• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6096981
• Journal Information: Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 69:1; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BEAMS
CHARGED PARTICLES
CLEANING
COHERENT SCATTERING
DIFFRACTION
ELECTRON DIFFRACTION
ELEMENTS
EPITAXY
GERMANIUM
HYDROGEN IONS
ION BEAMS
IONS
METALS
MOLECULAR BEAM EPITAXY
NATIONAL ORGANIZATIONS
PHYSICAL RADIATION EFFECTS
RADIATION EFFECTS
ROUGHNESS
SANDIA LABORATORIES
SCATTERING
SURFACE CLEANING
SURFACE FINISHING
SURFACE PROPERTIES
US AEC
US DOE
US ERDA
US ORGANIZATIONS