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Title: Nonconservative formation of [l angle]100[r angle] misfit dislocation arrays at In[sub 0. 2]Ga[sub 0. 8]As/GaAs(001) interfaces during post-growth annealing

Journal Article · · Applied Physics Letters; (United States)
DOI:https://doi.org/10.1063/1.110537· OSTI ID:6096402
; ;  [1]; ;  [2]
  1. Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720 (United States)
  2. Sandia National Laboratories, Albuquerque, New Mexico 87185-5800 (United States)

Transmission electron microscopy is applied to investigate the effect of annealing on misfit dislocations in an In[sub 0.2]Ga[sub 0.8]As/GaAs(001) heterostructure. In as-grown samples, an orthogonal array of 60[degree] dislocations along [l angle]110[r angle] directions is observed in the interface. During annealing, the 60[degree] dislocations along [l angle]110[r angle] directions are bent from [l angle]110[r angle] directions toward [l angle]100[r angle] directions. The process represents a new strain relaxation mechanism in semiconductor heterostructures. As the dislocation segments along [l angle]100[r angle] can relieve the strain more effectively than 60[degree] dislocations, we propose that the dislocations move nonconservatively in or near the interface by diffusion along the dislocation cores or in the heterointerface.

DOE Contract Number:
AC03-76SF00098; AC04-76DP00789
OSTI ID:
6096402
Journal Information:
Applied Physics Letters; (United States), Vol. 63:16; ISSN 0003-6951
Country of Publication:
United States
Language:
English