Secondary ion mass spectrometry: basic concepts, instrumental aspects, applications and trends
In their preface, the authors note that no comprehensive treatment of secondary-ion mass spectrometry exists and that this book was written to correct the omission. Drawing on a total of over 75 years of experience with the method, these three authors have assembled a monumental work that belongs on the desk of every mass spectroscopist and every surface scientist. After a brief introductory chapter, the second chapter provides an extensive review of the ion-solid interactions, beginning with processes induced in the solid target by energetic primary ion impact, including discussions of ion stopping powers, ion trajectories, and damage and mixing phenomena. The third chapter provides an in-depth overview of quantitative analysis with secondary-ion mass spectrometry. Both surface effect and thermodynamic models of quantitation are described, with a frank assessment of the merits and limitations of both. The longest chapter in the book deals with the various aspects of instrumentation, including imaging properties of ion optical elements (electric and magnetic sectors, and quadrupole mass analyzers), primary ion sources, focusing systems, detection systems, and instrument descriptions. The operational modes of secondary ion mass spectrometry are discussed in the next chapter, including surface analyses, depth-profile analyses, lateral imaging, and sputtered neutral mass spectrometry. A chapter on applications of secondary-ion mass spectrometry to electronics materials, geology, metallurgy, and surface science follows. The penultimate chapter describes the combination of secondary-ion mass spectrometry with other analytical techniques in both surface analysis and depth-profile experiments. The final chapter is a short preview of future developments in secondary-ion mass spectrometry, concentrating on ion transmission, ultimate spatial resolutions, and limitations to depth-profile accuracy.
- OSTI ID:
- 6092161
- Country of Publication:
- United States
- Language:
- English
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CHEMICAL ANALYSIS
DOCUMENT TYPES
ELECTRON MICROPROBE ANALYSIS
MASS SPECTROMETERS
MASS SPECTROSCOPY
MEASURING INSTRUMENTS
MICROANALYSIS
QUANTITATIVE CHEMICAL ANALYSIS
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THERMODYNAMICS
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