Experimental study of the electron density and discharge dynamics in a XeCl excimer laser

Journal Article · Mon Oct 15 04:00:00 EDT 1990 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.346268· OSTI ID:6079098

Meyer, J; Elezzabi, A Y ^[1]

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1. Department of Physics, The University of British Columbia, Vancouver, BC (Canada)

The temporal variation of the electron and current densities as well as the discharge voltage in a XeCl excimer laser discharge is studied as function of gas pressure and HCl+Xe concentration. The results show that independent of pressure and gas mix composition the electron drift velocity is a constant of {ital v}{sub {ital d}}=(1.2{plus minus}0.2){times}10{sup 6} cm s{sup {minus}1}. While in discharges containing only helium the current and electron density are independent of pressure {ital P}, both quantities vary as {ital P}{sup 0.6} once Xe and HCl have been added. The results are examined considering the most important atomic reaction rates.

• OSTI ID: 6079098
• Journal Information: Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 68:8; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
426002* -- Engineering-- Lasers & Masers-- (1990-)
CHLORIDES
CHLORINE COMPOUNDS
CURRENT DENSITY
ELECTRIC DISCHARGES
ELECTRON DENSITY
EXCIMER LASERS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
INTERFEROMETRY
LASERS
PRESSURE DEPENDENCE
QUANTITY RATIO
RARE GAS COMPOUNDS
XENON CHLORIDES
XENON COMPOUNDS