Preparation of a-Si:H films and devices in the Interdigital-Vertical-Electrode Deposition Apparatus
Conference
·
· Conf. Rec. IEEE Photovoltaic Spec. Conf.; (United States)
OSTI ID:6070845
A new a-Si:H film deposition apparatus named ''Interdigital-Vertical-Electrode Deposition Apparatus'' has been developed to achieve a high production throughput of a-Si:H devices. In the IVE apparatus, since vertically positioned several rf electrodes and grounded electrodes are arranged interdigitally, the number of discharging section for the deposition can be increased. The a-Si:H films prepared in the IVE apparatus have been evaluated in terms of the film thickness uniformity and electrical and optical properties. It has been confirmed that the IVE apparatus is suitable for fabricating a-Si:H devices with large cell area. The conversion efficiency obtained in glass substrate a-Si:H solar cells was 9.2% and 8.0% for cells with an area of 1 cm/sup 2/ and 100 cm/sup 2/, respectively.
- Research Organization:
- Fuji Electric Corporate Research and Development Ltd., 2-2-1 Nagasaka, Yokosuka, Kanagawa
- OSTI ID:
- 6070845
- Report Number(s):
- CONF-840561-
- Conference Information:
- Journal Name: Conf. Rec. IEEE Photovoltaic Spec. Conf.; (United States)
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
DEPOSITION
DIGITAL SYSTEMS
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELECTRODEPOSITION
ELECTROLYSIS
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
GLASS
LYSIS
OPTICAL PROPERTIES
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SUBSTRATES
SURFACE COATING
THIN FILMS
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
DEPOSITION
DIGITAL SYSTEMS
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELECTRODEPOSITION
ELECTROLYSIS
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
GLASS
LYSIS
OPTICAL PROPERTIES
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SUBSTRATES
SURFACE COATING
THIN FILMS